The SCT Axis series sputter systems were designed with flexibility in mind and have a proven track record of reliability.
All Axis sputter systems have load-locks for high throughput and come with a choice of two (Axis II), three (Axis III) and four (Axis IV) target configurations. RF magnetron, RF diode and DC magnetron cathodes are available at each cathode position. DC Bias is also available. Two styles of cathodes are offered: planar and inset, the latter allowing for three distinct target shapes.
Load-Lock and Process Chambers
The Axis processes one 15″ x 15″ pallet at a time, but the addition of a two-level load-lock allows for simultaneous loading and unloading of pallets while sputtering and etching takes place in the process chamber.
This horizontal sputter system has multipass scanning capability – if a particular cathode cannot deposit enough material on the substrate on one pass as called for in a particular process, the system has the capacity to reverse direction, and continue as often as needed or co-sputtering of two different materials
The cathodes are all equipped with cross contamination shields which prevent adjacent target contamination during sputtering. These stainless steel shields can either be fixed or movable.
The RF etch station is standard, and contained inside the process chamber thereby reducing the substrates’ exposure to atmosphere. The etch platform is water-cooled and pneumatically actuated. It operates by lifting the pallet off the pallet carrier for etching. A shutter, placed directly above3 the pallet, acts as an etch catcher as well as a ground plane.
The RF generator and the DC power supply are housed under the chamber within the system’s frame. A 10kW DC power supply is standard, with an option for 20 kilowatts. For RF magnetron or diode operations, standard power is 1.5kW, with 3kW optional operating at 13.56 Mhz.
Programmable High Vacuum System Controller with Data Logging Capabilities
SCT provides as a standard a PLC control system which includes ladder logic software with required programming for the SCT Axis, written specifically to accommodate customer specifications. The operator/engineer computer interface includes a touch screen display, HMI, and all required software programming. The control system also can perform data logging of all key process variables.
As an option, SCT can customize reports of the data to meet specific customer requests.